Step and Scan Platform SSP700 

• Versatile platform to probe semiconductor/solar bulk, film materials and devices.
• Flexible external instruments
• Graphic User Interface in direct computer control
• Customized solutions available for special optical/electrical/RF/thermal materials perturbation applications
• Round substrates up to 4” (custom shapes and 6” round substrate option available upon request)

Features
1. Substrate Map data storage
2. Programmable speed and acceleration control for X, Y and Z motor
3. Programmable Z –height movement
4. Remote/manual light on-off control with long life high-bright LED illumination
5. X-Y stage travel: 150mm×150mm
6. High Accuracy: ±5 µm